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Author : Tai-Ran Hsu
Publisher : McGraw-Hill Science/Engineering/Math
Total Pages : 448

Hsus textbook is the first to provide a comprehensive overview of MEMS and microsystems for engineering students.The author provides the background information needed to understand microtechnologies, including solid mechanics, physics, and materials. Design and manufacturing aspects of MEMS are covered extensively; and the author chooses examples and applications from a variety of areas, including telecommunications, biomedical device design, manufacturing systems, mechanical systems and aerospace applications. Packaging aspects are also discussed, in the context of MEMS design and manufacture.

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